A large scale systematic study of graphene/metal contact resistance using cTLM
نویسندگان
چکیده
In this work, a systematic study of the graphene/metal contact resistance (RC) is conducted. The circular Transfer Length Method (cTLM) is used to determine the RC values with several metals. Samples with Cu, Ti, Ni, Pt, Ag, Pd and Au contacts were fabricated and electrically characterized. Our results indicate that noble metals show lower RC. The lowest RC was observed for Au samples (~2.3kΩ.μm). Further improvement of contact is observed after a high temperature (300 o C) anneal in Ar.
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